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Thermal Process Solutions
for Semiconductor & MEMS

SEMITRONIX designs and manufactures diffusion furnaces, LP-CVD systems and spin rinse dryers for semiconductor, MEMS and display fabs — from new equipment to controller replacement and software upgrades.

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WAFER LOADZONE 1ZONE 2ZONE 3ZONE 4ZONE 5N2BUBBLERH2O VAPORGAS INVACUUM PUMPVACUUMPoly-SiOxidationAnnealTEMPERATURE PROFILETIMELP-CVDOXIDATIONHIGH-TEMP ANNEAL
WAHF-8 horizontal furnace in a cleanroom

Diffusion Furnace
& LP-CVD

Horizontal, vertical and R&D furnaces, custom-built to order for 100 to 300 mm wafers and your process requirements.

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PROCESSLOADRINSESPIN DRYPARTICLE COUNTHIGHLOWTIMECLEANSPINNING OFF PARTICLESWAFER CLEAN ✓SPIN RINSE DRYER
Spin rinse dryer in a cleanroom

Spin Rinse Dryers

150 to 300 mm spin rinse dryers in single or dual stack, with rotors and carriers built in-house and spare parts from stock.

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SEMITRONIX
STOS main screenSTOS robot teachingSTOS trend graph
STOSFurnace control software
Recipe · Temperature · Gas · RobotOne screen, full control
Tempress · BTU · Kokusai · TELLegacy controller replacement
W-301MD vertical furnace with STOS touch screen
TOPCENTERBOTTOMGAS INWAFER THICKNESSTARGETTIMEDEPOSITIONTARGET REACHED ✓WAFER LOADBOAT UPPROCESS

Furnace Control
Software

STOS puts recipe, temperature, gas and robot control on one screen — replacing legacy controllers on Tempress, BTU, Kokusai and TEL furnaces, with Windows-based trend, alarm and access management.

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M-TRACK · SPIN COATERPR DISPENSESPIN COATINGEBR · EDGE BEAD REMOVALCOATING COMPLETEMTRACKWAFER THICKNESSEDGECENTEREDGESPIN COATINGEDGE BEAD REMOVALUNIFORMITY ✓
M-TRACK manual coater track in a cleanroom

M-TRACK
Manual Coater Track

A compact manual track for photoresist coating: spin coater with dispense arm, hot plate and cool plate, all run from one touch screen — built for R&D lines and small-lot production.

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R&D horizontal furnace in a cleanroom
R&D furnace touch screen and loader
R&D furnace cantilever loader with wafer boat
FRONTCENTERREARGASUNIFORMITYFRONTCENTERREARMEASURINGUNIFORMITY ✓TEMPERATURE1000300TIME300 °C350 °C400 °C450 °C500 °C550 °C600 °C650 °C700 °C750 °C800 °C850 °C900 °C950 °C1000 °CWAFER LOADHEAT UPPROCESSCOOL DOWNUNLOAD

R&D Furnace

A compact single-tube furnace for research labs and pilot lines: cantilever loading, atmospheric or LP-CVD processes and the same STOS control as our production systems.

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Business Areas

Thermal process equipment,
built and serviced in Korea.

Furnace, Spin Rinse Dryer and Software — three pillars of thermal processing for semiconductor and MEMS fabs.

Diffusion Furnace & LP-CVD
01Diffusion Furnace & LP-CVDVertical and horizontal furnaces for 100 to 300 mm wafers — from atmospheric oxidation and annealing to LP-CVD nitride, poly-Si and TEOS, plus R&D furnaces for labs.View products
Spin Rinse Dryer
02Spin Rinse Dryer150 to 300 mm spin rinse dryers in single or dual stack, with carriers and rotors built in-house.View products
Software
03SoftwareSTOS replaces legacy furnace controllers on Tempress, BTU, Kokusai and TEL systems, and FTOS drives vision lens sorting.View products
Controller Replacement & Upgrade

Still running a legacy furnace?
Bring it up to date with STOS.

We replace aging controllers on Tempress, BTU, Kokusai and TEL furnaces with our STOS software and new control hardware — keeping the tube, heater and gas system you already trust.

TEMPRESSHorizontal & vertical
BTU / BTIHorizontal
KOKUSAIHorizontal & vertical
TELHorizontal
FURNACE CTRL V2.1 TUBE 1STEP 07 PROCESS RUNNINGZONE1 ####### ZONE2 #######ZONE3 ####### ZONE4 #######GAS N2 ON O2 OFF DCS OFFBOAT IN TIME 0:47:12> F1 RECIPE F2 TREND F3 ALARM789F1456F2123F30.ENTESCALARMHOLDRUNEMERGENCY
BEFORELegacy controller · text terminal, no data
→
STOS main screen
AFTERSTOS on Windows · touch screen, trends, alarms
Keep the furnace, replace the brainNew controller, wiring and STOS software; the tube, heater and gas system stay in place.
Everything on one screenRecipe, temperature, gas and boat loader control, with trend, alarm and access management built in.
Supported for years to comeSpare parts from stock and on-site engineers in Korea, so the upgraded furnace keeps running.
Software upgrade productsRequest a quote
Why SEMITRONIX

Four reasons fabs and labs
keep coming back.

Engineers in KoreaOur own engineers handle installation, service and on-site support — fast response, no middleman.
Spare parts in stockBoats, paddles, tubes, sensors and controller parts ready to ship, for our systems and legacy furnaces.
One team, design to softwareMechanical, electrical and software are all developed in-house, so every part fits together.
Built to orderHorizontal, vertical and R&D furnaces and spin rinse dryers, sized and configured for your process.
CertifiedCE · Furnace & SRDINNO-BIZPromising Export SMEMaterials & Components SpecialistSoftware copyrights ×3View certifications
About SEMITRONIX

Engineering the heat
behind every wafer.

Based in Cheongju, Korea, SEMITRONIX TECHNOLOGY designs and builds thermal process equipment and writes the software that runs it. One team covers new systems, upgrades, spare parts and on-site support.

Company ProfileOverviewGlobal NetworkChina · USACertificationsCE · InnoBiz · Software copyrightsLocationCheongju HQ · Daegu Tech Center
30+Systems and software products
40+Spare parts in stock
2Sites in Korea — Cheongju, Daegu
8Certifications and software copyrights
Products30 systems, parts and softwareInventory & Spare PartsUsed tools and parts in stockContactTechnical inquiry, quotation, directions
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